MPXM2102AS datasheet(589/670 Pages) MOTOROLA

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Motorola Sensor Device Data

www.motorola.com/semiconductors

Glossary of Terms

Absolute Pressure Sensor

A sensor which measures input pressure in relation to a zero pressure (a total vacuum on one side of

the diaphragm) reference.

Analog Output

An electrical output from a sensor that changes proportionately with any change in input pressure.

Accuracy — also see

Pressure Error

A comparison of the actual output signal of a device to the true value of the input pressure. The various

errors (such as linearity, hysteresis, repeatability and temperature shift) attributing to the accuracy of

a device are usually expressed as a percent of full scale output (FSO).

Altimetric Pressure

Transducer

A barometric pressure transducer used to determine altitude from the pressure-altitude profile.

Barometric Pressure

Transducer

An absolute pressure sensor that measures the local ambient atmospheric pressure.

Burst Pressure

The maximum pressure that can be applied to a transducer without rupture of either the sensing ele-

ment or transducer case.

Calibration

A process of modifying sensor output to improve output accuracy.

Chip

A die (unpackaged semiconductor device) cut from a silicon wafer, incorporating semiconductor cir-

cuit elements such as resistors, diodes, transistors, and/or capacitors.

Compensation

Added circuitry or materials designed to counteract known sources of error.

Diaphragm

The membrane of material that remains after etching a cavity into the silicon sensing chip. Changes

in input pressure cause the diaphragm to deflect.

Differential Pressure Sensor

A sensor which is designed to accept simultaneously two independent pressure sources. The output

is proportional to the pressure difference between the two sources.

Diffusion

A thermochemical process whereby controlled impurities are introduced into the silicon to define the

piezoresistor. Compared to ion implantation, it has two major disadvantages: 1) the maximum impuri-

ty concentration occurs at the surface of the silicon rendering it subject to surface contamination,

and making it nearly impossible to produce buried piezoresistors; 2) control over impurity concentra-

tions and levels is about one thousand times poorer than obtained with ion implantation.

Drift

An undesired change in output over a period of time, with constant input pressure applied.

End Point Straight Line Fit

Motorola’s method of defining linearity. The maximum deviation of any data point on a sensor output

curve from a straight line drawn between the end data points on that output curve.

Error

The algebraic difference between the indicated value and the true value of the input pressure.

Usually expressed in percent of full scale span, sometimes expressed in percent of the sensor output

reading.

Error Band

The band of maximum deviations of the output values from a specified reference line or curve due

to those causes attributable to the sensor. Usually expressed as “

± % of full scale output.” The

error band should be specified as applicable over at least two calibration cycles, so as to include

repeatability, and verified accordingly.

Excitation Voltage (Current) —

see Supply Voltage (Current)

The external electrical voltage and/or current applied to a sensor for its proper operation (often referred

to as the supply circuit or voltage). Motorola specifies constant voltage operation only.

Full Scale Output

The output at full scale pressure at a specified supply voltage. This signal is the sum of the offset signal

plus the full scale span.

Full Scale Span

The change in output over the operating pressure range at a specified supply voltage. The SPAN of

a device is the output voltage variation given between zero differential pressure and any given

pressure. FULL SCALE SPAN is the output variation between zero differential pressure and when the

maximum recommended operating pressure is applied.

Hysteresis — also see Pressure

Hysteresis and Temperature

Hysteresis

HYSTERESIS refers to a transducer’s ability to reproduce the same output for the same input,

regardless of whether the input is increasing or decreasing. PRESSURE HYSTERESIS is measured

at a constant temperature while TEMPERATURE HYSTERESIS is measured at a constant pressure

in the operating pressure range.

Freescale Semiconductor, Inc.

For More Information On This Product,

Go to: www.freescale.com

MPXM2102AS Datasheet(PDF) 589 Page - Motorola, Inc

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