MPXM2102AS datasheet(590/670 Pages) MOTOROLA

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Motorola Sensor Device Data

www.motorola.com/semiconductors

Glossary of Terms (continued)

Input Impedance (Resistance)

The impedance (resistance) measured between the positive and negative (ground) input terminals

at a specified frequency with the output terminals open. For Motorola X-ducer, this is a resistance

measurement only.

Ion Implantation

A process whereby impurity ions are accelerated to a specific energy level and impinged upon the

silicon wafer. The energy level determines the depth to which the impurity ions penetrate the silicon.

Impingement time determines the impurity concentration. Thus, it is possible to independently

control these parameters, and buried piezoresistors are easily produced. Ion implantation is

increasingly used throughout the semiconductor industry to provide a variety of products with

improved performance over those produced by diffusion.

Laser Trimming (Automated)

A method for adjusting the value of thin film resistors using a computer-controlled laser system.

Leakage Rate

The rate at which a fluid is permitted or determined to leak through a seal. The type of fluid, the

differential pressure across the seal, the direction of leakage, and the location of the seal must be

specified.

Linearity Error

The maximum deviation of the output from a straight line relationship with pressure over the

operating pressure range, the type of straight line relationship (end point, least square

approximation, etc.) should be specified.

Load Impedance

The impedance presented to the output terminals of a sensor by the associated external circuitry.

Null

The condition when the pressure on each side of the sensing diaphragm is equal.

Null Offset

The electrical output present, when the pressure sensor is at null.

Null Temperature Shift

The change in null output value due to a change in temperature.

Null Output

See ZERO PRESSURE OFFSET

Offset

See ZERO PRESSURE OFFSET

Operating Pressure Range

The range of pressures between minimum and maximum pressures at which the output will meet

the specified operating characteristics.

Operating Temperature Range

The range of temperature between minimum and maximum temperature at which the output will

meet the specified operating characteristics.

Output Impedance

The impedance measured between the positive and negative (ground) output terminals at a speci-

fied frequency with the input open.

Overpressure

The maximum specified pressure which may be applied to the sensing element of a sensor without

causing a permanent change in the output characteristics.

Piezoresistance

A resistive element that changes resistance relative to the applied stress it experiences (e.g., strain

gauge).

Pressure Error

The maximum difference between the true pressure and the pressure inferred from the output for

any pressure in the operating pressure range.

Pressure Hysteresis

The difference in the output at any given pressure in the operating pressure range when this

pressure is approached from the minimum operating pressure and when approached from the

maximum operating pressure at room temperature.

Pressure Range — also see

Operating Pressure Range

The pressure limits over which the pressure sensor is calibrated or specified.

Pressure Sensor

A device that converts an input pressure into an electrical output.

Proof Pressure

See OVERPRESSURE

Ratiometric

Ratiometricity refers to the ability of the transducer to maintain a constant sensitivity, at a constant

pressure, over a range of supply voltage values.

Ratiometric

(Ratiometricity Error)

At a given supply voltage, sensor output is a proportion of that supply voltage. Ratiometricity error

is the change in this proportion resulting from any change to the supply voltage. Usually expressed

as a percent of full scale output.

Freescale Semiconductor, Inc.

For More Information On This Product,

Go to: www.freescale.com

MPXM2102AS Datasheet(PDF) 590 Page - Motorola, Inc

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